Natale (Nat) M. Ceglio

Natale (Nat) M. Ceglio, a leading scientist in the development of X-ray lasers, extreme ultraviolet lithography and optics, died July 2 with his family and friends by his side at his home that he designed and built. He was 72.

Ceglio was born Sept. 6, 1944 in Manhattan, New York. He obtained his master’s and doctorate in nuclear science and engineering from the Massachusetts Institute of Technology along with a bachelor’s in applied physics and a bachelor’s in physics from Columbia University. He was a physicist by training and became an authority in the fields of plasma physics, lasers, optics and extreme ultraviolet lithography.

Ceglio was a dynamic leader in technical organizations. He was a team builder with a strong track record in providing innovative but practical solutions to difficult problems. He began his career at Lawrence Livermore National Laboratory in 1976 and was one of the key individuals responsible for helping to forge the largest technical partnership with multiple Silicon Valley companies, creating a Cooperative Research and Development Agreement valued at about $250 million. After 20 years at LLNL, Ceglio set his sights on Silicon Valley, where he held several top management positions. He was the recipient of 11 R&D 100 awards, more than any other individual worldwide. He also was the recipient of the Department of Energy’s “Award of Excellence.”

He was awarded multiple patents in the areas of optics, microscopy, lithography, particle beams, sputter deposition, information storage and wafer inspection. He had more than 10 extraordinary citations in the popular press (Science News, Physics Today, The New York Times and The Wall Street Journal) in which articles were written highlighting his technical work.

Ceglio is a Vietnam-era veteran who proudly served as a lieutenant in the U.S. Navy. He enjoyed his family, friends and his collaborations with colleagues. He was a tennis enthusiast, liked downhill skiing, movies, music and working. His latest endeavor was authoring a comic book featuring Jonathan Safer who was going to make the world a safer place. He also shared a love for animals, including his cat, Alexa.

Ceglio will be remembered as a loving husband, son-in-law, brother, uncle and loyal friend. He will be deeply missed.

Survivors include his wife and life partner of 28 years, Kelly Montgomery Ceglio of Pleasanton, California; sister, Marietta Kinane; brothers, Michael Ceglio (Sara) and Chris Ceglio (Amy); in-laws, Kathy and Kerm Montgomery; special nieces and nephews and many dear friends and family members.

Services are scheduled for Saturday, July 8, at Cedar Grove Community Church, 2021 College Avenue, Livermore, California, beginning at 4 p.m. followed by a celebration of his life. Friends and family are invited to a viewing on Friday, July 7 (10 a.m.-2 p.m.) or Saturday, July 8 (10 a.m.-2 p.m.) at Graham-Hitch Mortuary in Pleasanton.